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engenuity - innovation through engineering analysis A Cleanroom

Airflow in a Chip Fabrication Cleanroom

1: Objectives
2: Background
3: Results
4: Conclusions
5: Benefits

To investigate the uniformity of the air flow in a chip fabrication cleanroom. In particular to assess the uniformity of the velocity flowfield, detect regions of unsteadiness and re-circulation, and to determine the time taken for the flowfield to stabilise after a disturbance.
 

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